| Cat No. | Substance | Formula | Sputtering Target Planar/ Magnetron | Purity (%) |
|---|---|---|---|---|
| SA-110 | Aluminum Metal | Al | Disc , Rect. | 99.999 |
| SA-111 | Aluminum Metal | Al | Disc , Rect. | 99.99 |
| SA-210 | Aluminum Nitride | AlN | Disc , Rect. | 99.00 |
| SA-310 | Aluminum Oxide | Al2O3 | Disc , Rect. | 99.99 |
| SB-110 | Barium Titanate | BaTiO3 | Disc , Rect. | 99.9 |
| SC-110 | Cadmium Metal | Cd | Disc , Rect. | 99.99 |
| SC-210 | Chromium Metal | Cr | Disc , Rect. | 99.90 |
| SC-310 | Copper Metal | Cu | Disc , Rect. | 99.99 |
| SG-110 | Germanium Metal | Ge | Disc , Rect. | 99.999 |
| SH-110 | Hafnium Metal | Hf | Disc , Rect. | 99.999 |
| SI-110 | Indium Metal | In | Disc , Rect. | 99.999 |
| SI-210 | ITM Metal Alloy | Disc , Rect. | 99.99 | |
| SM-110 | Molybdenum Metal | Mo | Disc , Rect. | 99.95 |
| SM-210 | Magnesium Metal | Mg | Disc , Rect. | 99.90 |
| SN-110 | Nickel Metal | Ni | Disc , Rect. | 99.90 |
| SN-210 | Niobium Metal | Nb | Disc , Rect. | 99.99 |
| SN-310 | Niobium Oxide | Nb2O5 | Disc , Rect. | 99.99 |
| SP-110 | Platinum Metal | Pt | Disc , Rect. | 99.99 |
| ST-110 | Tungsten Metal | W | Disc , Rect. | 99.95 |
| ST-210 | Titanium Metal | Ti | Disc , Rect. | 99.90 |
| ST-220 | Titanium Metal | Ti | Disc , Rect. | 99.70 |
| ST-310 | Tin Metal | Sn | Disc , Rect. | 99.99 |
| ST-410 | Titanium-Aluminum-Vanadium | Ti-6Al-4V | Disc , Rect. | 99.50 |
| ST-510 | Tantalum Oxide | Ta2O5 | Disc , Rect. | 99.99 |
| ST-610 | Tantalum Metal | Ta | Disc , Rect. | 99.95 |
| SS-110 | Silicon Metal | Si | Disc , Rect. | 99.99 |
| SS-210 | Silicon Dioxide | SiO2 | Disc , Rect. | 99.99 |
| SS-310 | Silicon Monoxide | SIO | Disc , Rect. | 99.99 |
| SS-410 | Silicon Nitride | Si3N4 | Disc , Rect. | 99.90 |
| SG-810 | Gold | Au | Disc , Rect. | 99.999 |
| SS-510 | Silver Metal | Ag | Disc , Rect. | 99.999 |
| SS-610 | Strontium Titanate | SrTiO3 | Disc , Rect. | 99.99 |
| SY-110 | Yttrium Fluoride | YF3 | Disc , Rect. | 99.99 |
| SY-210 | Yttrium Oxide | Y2O3 | Disc , Rect. | 99.99 |
| SZ-110 | Zirconium Metal | Zr | Disc , Rect. | 99.90 |
| SZ-120 | Zirconium Metal | Zr | Disc , Rect. | 98.00 |
| SZ-210 | Zinc Metal | Zn | Disc , Rect. | 99.99 |
| SZ-310 | Zinc Sulfide | ZnS | Disc , Rect. | 99.90 |
| SZA-110 | Zinc-Aluminum | ZnAl | Disc , Rect. | 99.99 |
| ST-710 | Titanium-Aluminum | TiAl | Disc , Rect. | 99.90 |
| ST-810 | Tungsten-Titanium | W-Ti | Disc , Rect. | 99.90 |